Author, as appears in the article.: Medina M; Rüter CE; Pujol MC; Kip D; Masons J; Ródenas A; Aguiló M; Díaz F

Department: Química Física i Inorgànica

e-ISSN: 2072-666X

URV's Author/s: , / Aguiló Díaz, Magdalena / Masons Bosch, Jaime

Keywords: Ultraprecise dicing saw Tapered waveguides Optical sensors Label-free Biochemical sensors tapered waveguides label-free biochemical sensors

Abstract: © 2019 by the authors. This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 μm wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.

Thematic Areas: Química Physics, applied Nanoscience & nanotechnology Mechanical engineering Instruments & instrumentation Engenharias iv Electrical and electronic engineering Control and systems engineering Chemistry, analytical

licence for use: https://creativecommons.org/licenses/by/3.0/es/

ISSN: 2072666X

Author's mail: f.diaz@urv.cat jaume.masons@urv.cat magdalena.aguilo@urv.cat

Author identifier: 0000-0003-4581-4967 0000-0003-4325-6084 0000-0001-6130-9579

Record's date: 2023-10-14

Journal volume: 10

Papper version: info:eu-repo/semantics/publishedVersion

Link to the original source: https://www.mdpi.com/2072-666X/10/7/454

Licence document URL: http://repositori.urv.cat/ca/proteccio-de-dades/

Papper original source: Micromachines. 10 (7): 454-

APA: Medina M; Rüter CE; Pujol MC; Kip D; Masons J; Ródenas A; Aguiló M; Díaz F (2019). KLu(WO4)2/SiO2 tapered waveguide platform for sensing applications. Micromachines, 10(7), 454-. DOI: 10.3390/mi10070454

Article's DOI: 10.3390/mi10070454

Entity: Universitat Rovira i Virgili

Journal publication year: 2019

First page: 454

Publication Type: Journal Publications