Repositori institucional URV
| Autor/es de la URV: | Aguiló Díaz, Magdalena / Díaz González, Francisco Manuel / Masons Bosch, Jaime / Medina Allué, Maria Alba / Pujol Baiges, Maria Cinta |
| Autor según el artículo: | Medina, Marc; Rueter, Christian E; Cinta Pujol, Maria; Kip, Detlef; Masons, Jaume; Rodenas, Airan; Aguilo, Magdalena; Diaz, Francisco |
| Direcció de correo del autor: | mariaalba.medina@estudiants.urv.cat mariaalba.medina@estudiants.urv.cat magdalena.aguilo@urv.cat jaume.masons@urv.cat mariacinta.pujol@urv.cat f.diaz@urv.cat |
| Identificador del autor: | 0000-0002-6808-7902 0000-0002-6808-7902 0000-0001-6130-9579 0000-0003-4325-6084 0000-0002-1052-8031 0000-0003-4581-4967 |
| Año de publicación de la revista: | 2019 |
| Tipo de publicación: | Journal Publications |
| ISSN: | 2072666X |
| e-ISSN: | 2072-666X |
| Referencia de l'ítem segons les normes APA: | Medina, Marc; Rueter, Christian E; Cinta Pujol, Maria; Kip, Detlef; Masons, Jaume; Rodenas, Airan; Aguilo, Magdalena; Diaz, Francisco (2019). KLu(WO4)2/SiO2 tapered waveguide platform for sensing applications. Micromachines, 10(7), 454-. DOI: 10.3390/mi10070454 |
| Referencia al articulo segun fuente origial: | Micromachines. 10 (7): 454- |
| Resumen: | © 2019 by the authors. This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 μm wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing. |
| DOI del artículo: | 10.3390/mi10070454 |
| Enlace a la fuente original: | https://www.mdpi.com/2072-666X/10/7/454 |
| Versión del articulo depositado: | info:eu-repo/semantics/publishedVersion |
| Acceso a la licencia de uso: | https://creativecommons.org/licenses/by/3.0/es/ |
| Departamento: | Química Física i Inorgànica |
| URL Documento de licencia: | https://repositori.urv.cat/ca/proteccio-de-dades/ |
| Áreas temáticas: | Química Physics, applied Nanoscience & nanotechnology Mechanical engineering Instruments & instrumentation Engenharias iv Electrical and electronic engineering Control and systems engineering Chemistry, analytical |
| Palabras clave: | Ultraprecise dicing saw Tapered waveguides Optical sensors Label-free Biochemical sensors tapered waveguides label-free biochemical sensors |
| Entidad: | Universitat Rovira i Virgili |
| Fecha de alta del registro: | 2024-10-19 |
| Página inicial: | 454 |
| Volumen de revista: | 10 |
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| DocumentPrincipal | DocumentPrincipal | application/pdf |
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