Articles producció científica> Enginyeria Electrònica, Elèctrica i Automàtica

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

  • Identification data

    Identifier: PC:1197
    Handle: https://hdl.handle.net/20.500.11797/PC1197
    Authors:
    E. LlobetF.E. Annanoucha,I. GràciaE. FiguerasC. CanéS. Vallejos
    Abstract:
    Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.

  • Others:

    Author, as appears in the article.: E. Llobet F.E. Annanoucha, I. Gràcia E. Figueras C. Cané S. Vallejos
    Department: Enginyeria Electrònica, Elèctrica i Automàtica
    URV's Author/s: LLOBET VALERO, EDUARD F.E. Annanoucha, I. Gràcia E. Figueras C. Cané S. Vallejos
    Keywords: AACVD functionalization Gas sensor arrays
    Abstract: Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.
    Research group: Microsystems and Nanotechnologies for Chemical Analysis
    Thematic Areas: Enginyeria electrònica Ingeniería electrónica Electronic engineering
    licence for use: https://creativecommons.org/licenses/by/3.0/es/
    ISSN: 0925-4005
    Author identifier: 0000-0001-6164-4342 n/a n/a 0000-0002-4229-3214 n/a n/a
    Record's date: 2015-08-05
    Last page: 383
    Journal volume: 216
    Papper version: info:eu-repo/semantics/acceptedVersion
    Link to the original source: http://www.sciencedirect.com/science/article/pii/S0925400515004098
    Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
    Article's DOI: 10.1016/j.snb.2015.03.076
    Entity: Universitat Rovira i Virgili
    Journal publication year: 2015
    First page: 374
    Publication Type: Article Artículo Article

  • Keywords:

    Nanotecnologia
    Gas, Detectors de
    Deposició química en fase vapor
    AACVD
    functionalization
    Gas sensor arrays
    Enginyeria electrònica
    Ingeniería electrónica
    Electronic engineering
    0925-4005

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