Author, as appears in the article.: E. Llobet F.E. Annanoucha, I. Gràcia E. Figueras C. Cané S. Vallejos
Department: Enginyeria Electrònica, Elèctrica i Automàtica
URV's Author/s: LLOBET VALERO, EDUARD F.E. Annanoucha, I. Gràcia E. Figueras C. Cané S. Vallejos
Keywords: AACVD functionalization Gas sensor arrays
Abstract: Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.
Research group: Microsystems and Nanotechnologies for Chemical Analysis
Thematic Areas: Enginyeria electrònica Ingeniería electrónica Electronic engineering
licence for use: https://creativecommons.org/licenses/by/3.0/es/
ISSN: 0925-4005
Author identifier: 0000-0001-6164-4342 n/a n/a 0000-0002-4229-3214 n/a n/a
Record's date: 2015-08-05
Last page: 383
Journal volume: 216
Papper version: info:eu-repo/semantics/acceptedVersion
Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
Entity: Universitat Rovira i Virgili
Journal publication year: 2015
First page: 374
Publication Type: Article Artículo Article
Repositori URV