Author, as appears in the article.: Medina, Marc; Rueter, Christian E; Cinta Pujol, Maria; Kip, Detlef; Masons, Jaume; Rodenas, Airan; Aguilo, Magdalena; Diaz, Francisco
Department: Química Física i Inorgànica
e-ISSN: 2072-666X
URV's Author/s: Aguiló Díaz, Magdalena / Díaz González, Francisco Manuel / Masons Bosch, Jaime / Medina Allué, Maria Alba / Pujol Baiges, Maria Cinta
Keywords: Ultraprecise dicing saw Tapered waveguides Optical sensors Label-free Biochemical sensors tapered waveguides label-free biochemical sensors
Abstract: © 2019 by the authors. This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 μm wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.
Thematic Areas: Química Physics, applied Nanoscience & nanotechnology Mechanical engineering Instruments & instrumentation Engenharias iv Electrical and electronic engineering Control and systems engineering Chemistry, analytical
licence for use: https://creativecommons.org/licenses/by/3.0/es/
ISSN: 2072666X
Author's mail: mariaalba.medina@estudiants.urv.cat mariaalba.medina@estudiants.urv.cat magdalena.aguilo@urv.cat jaume.masons@urv.cat mariacinta.pujol@urv.cat f.diaz@urv.cat
Author identifier: 0000-0002-6808-7902 0000-0002-6808-7902 0000-0001-6130-9579 0000-0003-4325-6084 0000-0002-1052-8031 0000-0003-4581-4967
Record's date: 2024-10-19
Journal volume: 10
Papper version: info:eu-repo/semantics/publishedVersion
Link to the original source: https://www.mdpi.com/2072-666X/10/7/454
Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
Papper original source: Micromachines. 10 (7): 454-
APA: Medina, Marc; Rueter, Christian E; Cinta Pujol, Maria; Kip, Detlef; Masons, Jaume; Rodenas, Airan; Aguilo, Magdalena; Diaz, Francisco (2019). KLu(WO4)2/SiO2 tapered waveguide platform for sensing applications. Micromachines, 10(7), 454-. DOI: 10.3390/mi10070454
Article's DOI: 10.3390/mi10070454
Entity: Universitat Rovira i Virgili
Journal publication year: 2019
First page: 454
Publication Type: Journal Publications
Repositori URV