Author, as appears in the article.: Debeda H; Lakhmi R; Clement P; Llobet E; Zamarreno CR; Arregui FJ; Lucat C
Department: Enginyeria Electrònica, Elèctrica i Automàtica
URV's Author/s: Llobet Valero, Eduard
Keywords: Thick films Silicon technologies Screen-printing Screen printing technology Screen printing Sacrificial layer Room temperature Nanocantilevers Micro-cantilevers Humidity and voc detection Gold coatings Gas detectors Chemical sensors Chemical sensing Cantilevers Alternative technologies
Abstract: Researches on microcantilever MEMS are numerous in different areas, physical or chemical sensing, actuation or energy harvesting. Because of their high sensitivity at room temperature, they have been shown to be interesting for gas detection. Though silicon technology allows the processing of such cantilevers, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film cantilevers is studied, through the association of the sacrificial layer process to the wellknown screen-printing technology used for the fabrication of low cost components and microsystems. Epoxytype, gold and resonant piezoelectric Au/PZT/Au cantilevers with or without coating have been successfully tested under humidity, toluene and benzene. The potentiality of the screen-printing technology for the development of cantilever-based gas sensors is demonstrated. © 2014 by IFSA Publishing, S. L.
Thematic Areas: Química Materiais Interdisciplinar Engenharias iv Engenharias ii Electrical and electronic engineering Control and systems engineering Ciência da computação Biodiversidade
licence for use: https://creativecommons.org/licenses/by/3.0/es/
Author's mail: eduard.llobet@urv.cat
Author identifier: 0000-0001-6164-4342
Record's date: 2023-02-19
Papper version: info:eu-repo/semantics/publishedVersion
Papper original source: Sensors And Transducers. 173 (6): 215-223
APA: Debeda H; Lakhmi R; Clement P; Llobet E; Zamarreno CR; Arregui FJ; Lucat C (2014). Inorganic and organic screen-printed cantilever-based gas sensors. Sensors And Transducers, 173(6), 215-223
Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
Entity: Universitat Rovira i Virgili
Journal publication year: 2014
Publication Type: Journal Publications
Repositori URV