Inorganic and organic screen-printed cantilever-based gas sensors

Identifier:  imarina:9285435

Handle: https://hdl.handle.net/20.500.11797/imarina9285435

Authors:  Debeda H; Lakhmi R; Clement P; Llobet E; Zamarreno CR; Arregui FJ; Lucat C

Abstract:
Researches on microcantilever MEMS are numerous in different areas, physical or chemical sensing, actuation or energy harvesting. Because of their high sensitivity at room temperature, they have been shown to be interesting for gas detection. Though silicon technology allows the processing of such cantilevers, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film cantilevers is studied, through the association of the sacrificial layer process to the wellknown screen-printing technology used for the fabrication of low cost components and microsystems. Epoxytype, gold and resonant piezoelectric Au/PZT/Au cantilevers with or without coating have been successfully tested under humidity, toluene and benzene. The potentiality of the screen-printing technology for the development of cantilever-based gas sensors is demonstrated.  © 2014 by IFSA Publishing, S. L.