Author, as appears in the article.: R. Solé; M. A. M. A. Butt; M. C. Pujol; A.Ródenas; G. Lifante; A. Choudhary; S. M. Ganapathy; D. P. Shepherd; J. S. Wilkinson; M. Aguiló; F. Díaz
Department: Química Física i Inorgànica
URV's Author/s: SOLÉ CARTAÑÀ, ROSA MARIA; M. A. M. A. Butt; PUJOL BAIGES, MARIA CINTA; A.Ródenas; G. Lifante; A. Choudhary; S. M. Ganapathy; D. P. Shepherd; J. S. Wilkinson; AGUILÓ DÍAZ, MAGDALENA; DÍAZ GONZÁLEZ, FRANCISCO MANUEL
Keywords: Integrated Optical Materials RbTiOPO4 Reactive Ion Etching
Abstract: Reactive ion etching of RbTiOPO4 (001) substrates and (Yb,Nb):RbTiOPO4/ RbTiOPO4 (001) epitaxial layers has been performed using fluorine chemistry. A maximum etch rate of 8.7 nm/m was obtained, and the deepest etch achieved was 3.5 m. The (Yb,Nb)-doped epitaxial layers showed a slower etching rate when compared with undoped material. Liquid phase epitaxial growth of cladding layers has also been performed, resulting in a high-quality interface growth without appreciable defects. 9-mm-long Mach Zehnder interferometer (MZI) and 9- mm-long Y-splitter structures were designed and patterned in RbTiOPO4 substrates and (Yb,Nb):RbTiOPO4/RbTiOPO4(001) epitaxial layers. The structures fabricated in RbTiOPO4 substrates were filled with laser active (Yb,Nb):RbTiOPO4 higher refractive index core material, and finally an RbTiOPO4
cladding was grown on the samples. The refractive index difference between the (Yb,Nb):RbTiOPO4 layer and the RbTiOPO4 substrate at 1.5 μm has been measured and optical waveguiding at this wavelength has been demonstrated.
Research group: Física i Cristal.lografia de Materials Física i Cristal·lografia de Nanomaterials
Thematic Areas: Química Química Chemistry
licence for use: https://creativecommons.org/licenses/by/3.0/es/
ISSN: 0733-8724
Author identifier: 0000-0002-5769-4141; ; 0000-0002-1052-8031; ; ; ; ; ; ; 0000-0001-6130-9579; 0000-0003-4581-4967
Record's date: 2017-05-26
Last page: 1871
Journal volume: 33
Papper version: info:eu-repo/semantics/acceptedVersion
Link to the original source: http://ieeexplore.ieee.org/abstract/document/6980107/
Funding program: plan; Excelencia; MAT2011-29255-C02-02 plan; Retos; MAT2013-47395-C4-4-R altres; Grupos consolidados; 2014SGR1358 altres; FI; 2012FI-B 00192
Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
Article's DOI: 10.1109/JLT.2014.2379091
Entity: Universitat Rovira i Virgili
Journal publication year: 2015
First page: 1863
Publication Type: Article Artículo Article
Repositori URV