Articles producció científica> Química Física i Inorgànica

Fabrication of Y-Splitters and Mach-Zehnder Structures on (Yb, Nb):RbTiOPO4/ RbTiOPO4 Epitaxial Layers by Reactive Ion Etching

  • Identification data

    Identifier: PC:2908
    Authors:
    Solé, R.Butt, M.A.Pujol, M.C.Ródenas, A.Lifante, G.Choudhary, A.Murugan, G.S.Shepherd, D.P.Wilkinson, J.S.Aguiló, M.Díaz, F.
    Abstract:
    Filiació URV: SI
  • Others:

    Author, as appears in the article.: Solé, R.; Butt, M.A.; Pujol, M.C.; Ródenas, A.; Lifante, G.; Choudhary, A.; Murugan, G.S.; Shepherd, D.P.; Wilkinson, J.S.; Aguiló, M.; Díaz, F.
    Department: Química Física i Inorgànica
    URV's Author/s: SOLÉ CARTAÑÀ, ROSA MARIA; Butt, M.A.; PUJOL BAIGES, MARIA CINTA; Ródenas, A.; Lifante, G.; Choudhary, A.; Murugan, G.S.; Shepherd, D.P.; Wilkinson, J.S.; AGUILÓ DÍAZ, MAGDALENA; DÍAZ GONZÁLEZ, FRANCISCO MANUEL
    Keywords: RbTiOPO4 Integrated Optical Materials
    Abstract: Reactive ion etching of RbTiOPO4 (001) substrates and (Yb,Nb):RbTiOPO4/ RbTiOPO4 (001) epitaxial layers has been performed using fluorine chemistry. A maximum etch rate of 8.7 nm/m was obtained, and the deepest etch achieved was 3.5 m. The (Yb,Nb)-doped epitaxial layers showed a slower etching rate when compared with undoped material. Liquid phase epitaxial growth of cladding layers has also been performed, resulting in a high-quality interface growth without appreciable defects. 9-mm-long Mach Zehnder interferometer (MZI) and 9-mm-long Y-splitter structures were designed and patterned in RbTiOPO4 substrates and (Yb,Nb):RbTiOPO4/RbTiOPO4(001) epitaxial layers. The structures fabricated in RbTiOPO4 substrates were filled with laser active (Yb,Nb):RbTiOPO4 higher refractive index core material, and finally an RbTiOPO4 cladding was grown on the samples. The refractive index difference between the (Yb,Nb):RbTiOPO4 layer and the RbTiOPO4 substrate at 1.5 µm has been measured and optical waveguiding at this wavelength has been demonstrated
    Research group: Física i Cristal·lografia de Nanomaterials Física i Cristal.lografia de Materials
    Thematic Areas: Chemistry Química Química
    licence for use: https://creativecommons.org/licenses/by/3.0/es/
    ISSN: 0733-8724
    Author identifier: 0000-0002-5769-4141; ; 0000-0002-1052-8031; ; ; ; ; ; ; 0000-0001-6130-9579; 0000-0003-4581-4967
    Record's date: 2017-06-15
    Last page: 1871
    Journal volume: 33
    Papper version: info:eu-repo/semantics/submittedVersion
    Link to the original source: http://ieeexplore.ieee.org/document/6980107/
    Funding program: altres; FI-DGR fellowship; 2012FI-B 00192; 2012FI-B 00192 altres; Grupos consolidados; 2014SGR1358; 2014SGR1358 plan; RETOS; MAT2013-47395-C4-4-R; MAT2013-47395-C4-4-R plan; RETOS; MAT2011-29255-C02-02; MAT2011-29255-C02-02
    Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
    Article's DOI: 10.1109/JLT.2014.2379091
    Entity: Universitat Rovira i Virgili
    Journal publication year: 2014
    First page: 1863
    Publication Type: Article Artículo Article
  • Keywords:

    Materials òptics
    RbTiOPO4
    Integrated Optical Materials
    Chemistry
    Química
    Química
    0733-8724
  • Documents:

  • Cerca a google

    Search to google scholar