Micromachined gas sensors based on Au-functionalized SnO2 nanorods directly integrated without catalyst seeds via AA-CVD

Identifier:  imarina:9374845

Handle: https://hdl.handle.net/20.500.11797/imarina9374845

Authors:  Vallejos, S; Selina, S; Annanouch, FE; Gràcia, I; Llobet, E; Blackman, C

Abstract:
Tin oxide nanorods functionalized with Au nanoparticles are vapour synthesised at relatively lower temperatures than previously reported and without the need of catalyst seeds using co-deposition method via aerosol-assisted chemical vapour deposition. These functionalized structures formed directly, in a single-step process, on silicon micromachined platforms are tested toward H-2, showing 12-fold greater response, 6-fold faster response time and better selectivity to CO compared to a similar non-functionalized system. Results show the significance of these method to form highly gas sensitive nanostructures compatible with the complementary electronic for the fabrication of gas microsensor devices. (C) 2016 The Authors. Published by Elsevier Ltd.