Modelization, simulation and design of micro-electro-mechanicazed systems (mems) preconcentrators for gas sensing

Identificador:  TDX:266

Handle: https://hdl.handle.net/20.500.11797/TDX266

Autores:  Inglés Bort, Roser

Resumen:
Nowadays the allowed limits of volatiles that are toxic at very low concentrations are becoming restrictive. For this reason, preconcentrators which let detection at low levels are becoming more important and its study is increasing.In this thesis, our aim is to design a planar preconcentrator in silicon technology, in order to be able to design in the same substrate the preconcentrator and the sensor system. Simulations have been developed to study its behaviour. A good homogenisation temperature is needed in order to obtain big concentrations in a narrow desorption peak. We will develop new designs which improve homogenisation temperature. Also, a large area is needed in order to have more adsorbent material which ensures more concentration. New design have been fabricated and characterized. Experimental results validate our simulations and let us to develop future designs avoiding time and cost fabrication.