Autor segons l'article: Medina, Marc; Rueter, Christian E; Cinta Pujol, Maria; Kip, Detlef; Masons, Jaume; Rodenas, Airan; Aguilo, Magdalena; Diaz, Francisco
Departament: Química Física i Inorgànica
e-ISSN: 2072-666X
Autor/s de la URV: Aguiló Díaz, Magdalena / Díaz González, Francisco Manuel / Masons Bosch, Jaime / Medina Allué, Maria Alba / Pujol Baiges, Maria Cinta
Paraules clau: Ultraprecise dicing saw; Tapered waveguides; Optical sensors; Label-free; Biochemical sensors; tapered waveguides; label-free; biochemical sensors
Resum: © 2019 by the authors. This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 μm wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.
Àrees temàtiques: Química; Physics, applied; Nanoscience & nanotechnology; Mechanical engineering; Instruments & instrumentation; Engenharias iv; Electrical and electronic engineering; Control and systems engineering; Chemistry, analytical
Accès a la llicència d'ús: https://creativecommons.org/licenses/by/3.0/es/
ISSN: 2072666X
Adreça de correu electrònic de l'autor: mariaalba.medina@estudiants.urv.cat; mariaalba.medina@estudiants.urv.cat; magdalena.aguilo@urv.cat; jaume.masons@urv.cat; mariacinta.pujol@urv.cat; f.diaz@urv.cat
Data d'alta del registre: 2024-10-19
Volum de revista: 10
Versió de l'article dipositat: info:eu-repo/semantics/publishedVersion
Enllaç font original: https://www.mdpi.com/2072-666X/10/7/454
URL Document de llicència: https://repositori.urv.cat/ca/proteccio-de-dades/
Referència a l'article segons font original: Micromachines. 10 (7): 454-
Referència de l'ítem segons les normes APA: Medina, Marc; Rueter, Christian E; Cinta Pujol, Maria; Kip, Detlef; Masons, Jaume; Rodenas, Airan; Aguilo, Magdalena; Diaz, Francisco (2019). KLu(WO4)2/SiO2 tapered waveguide platform for sensing applications. Micromachines, 10(7), 454-. DOI: 10.3390/mi10070454
DOI de l'article: 10.3390/mi10070454
Entitat: Universitat Rovira i Virgili
Any de publicació de la revista: 2019
Pàgina inicial: 454
Tipus de publicació: Journal Publications
Repositori URV