Articles producció científica> Química Física i Inorgànica

Fabrication of Y-Splitters and Mach-Zehnder Structures on (Yb,Nb):RbTiOPO4/RbTiOPO4 Epitaxial Layers by Reactive Ion Etching

  • Identification data

    Identifier: imarina:9241970
    Authors:
    Butt, M. A.Sole, R.Pujol, M. C.Rodenas, A.Lifante, G.Choudhary, A.Murugan, G. S.Shepherd, D. P.Wilkinson, J. S.Aguilo, M.Diaz, F.
    Abstract:
    Reactive ion etching of RbTiOPO4 (0 0 1) substrates and (Yb,Nb):RbTiOPO4/RbTiOPO4 (0 0 1) epitaxial layers has been performed using fluorine chemistry. A maximum etch rate of 8.7 nm/min was obtained, and the deepest etch achieved was 3.5 mu m. The (Yb,Nb)-doped epitaxial layers showed a slower etching rate when compared with undoped material. Liquid phase epitaxial growth of cladding layers has also been performed, resulting in a high-quality interface growth without appreciable defects. 9-mm-long Mach-Zehnder interferometer and 9-mm-long Y-splitter structures were designed and patterned in RbTiOPO4 substrates and (Yb,Nb):RbTiOPO4/RbTiOPO4 (0 0 1) epitaxial layers. The structures fabricated in RbTiOPO4 substrates were filled with laser active (Yb,Nb):RbTiOPO4 higher refractive index core material, and finally an RbTiOPO4 cladding was grown on the samples. The refractive index difference between the (Yb,Nb):RbTiOPO4 layer and the RbTiOPO4 substrate at 1.5 mu m has been measured and optical waveguiding at this wavelength has been demonstrated.
  • Others:

    Author, as appears in the article.: Butt, M. A.; Sole, R.; Pujol, M. C.; Rodenas, A.; Lifante, G.; Choudhary, A.; Murugan, G. S.; Shepherd, D. P.; Wilkinson, J. S.; Aguilo, M.; Diaz, F.;
    Department: Química Física i Inorgànica
    URV's Author/s: Aguiló Díaz, Magdalena / Díaz González, Francisco Manuel / Pujol Baiges, Maria Cinta / RODENAS SEGUI, AIRAN / Solé Cartañà, Rosa Maria
    Keywords: Wave-guides Titanyl phosphate Reactive ion etching Rbtiopo4 Rbtiopo 4 Rbtiopo 4 Rbtioaso4 Optical waves Niobium Ktiopo4 Integrated optical materials Growth Crystals
    Abstract: Reactive ion etching of RbTiOPO4 (0 0 1) substrates and (Yb,Nb):RbTiOPO4/RbTiOPO4 (0 0 1) epitaxial layers has been performed using fluorine chemistry. A maximum etch rate of 8.7 nm/min was obtained, and the deepest etch achieved was 3.5 mu m. The (Yb,Nb)-doped epitaxial layers showed a slower etching rate when compared with undoped material. Liquid phase epitaxial growth of cladding layers has also been performed, resulting in a high-quality interface growth without appreciable defects. 9-mm-long Mach-Zehnder interferometer and 9-mm-long Y-splitter structures were designed and patterned in RbTiOPO4 substrates and (Yb,Nb):RbTiOPO4/RbTiOPO4 (0 0 1) epitaxial layers. The structures fabricated in RbTiOPO4 substrates were filled with laser active (Yb,Nb):RbTiOPO4 higher refractive index core material, and finally an RbTiOPO4 cladding was grown on the samples. The refractive index difference between the (Yb,Nb):RbTiOPO4 layer and the RbTiOPO4 substrate at 1.5 mu m has been measured and optical waveguiding at this wavelength has been demonstrated.
    Thematic Areas: Telecommunications Química Optics Odontología Matemática / probabilidade e estatística Interdisciplinar Engineering, electrical & electronic Engenharias iv Engenharias iii Ciência da computação Atomic and molecular physics, and optics Astronomia / física
    licence for use: https://creativecommons.org/licenses/by/3.0/es/
    Author's mail: magdalena.aguilo@urv.cat mariacinta.pujol@urv.cat rosam.sole@urv.cat f.diaz@urv.cat
    Author identifier: 0000-0001-6130-9579 0000-0002-1052-8031 0000-0002-5769-4141 0000-0003-4581-4967
    Record's date: 2024-09-07
    Papper version: info:eu-repo/semantics/acceptedVersion
    Link to the original source: https://ieeexplore.ieee.org/document/6980107
    Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
    Papper original source: Journal Of Lightwave Technology. 33 (9): 1863-1871
    APA: Butt, M. A.; Sole, R.; Pujol, M. C.; Rodenas, A.; Lifante, G.; Choudhary, A.; Murugan, G. S.; Shepherd, D. P.; Wilkinson, J. S.; Aguilo, M.; Diaz, F.; (2015). Fabrication of Y-Splitters and Mach-Zehnder Structures on (Yb,Nb):RbTiOPO4/RbTiOPO4 Epitaxial Layers by Reactive Ion Etching. Journal Of Lightwave Technology, 33(9), 1863-1871. DOI: 10.1109/JLT.2014.2379091
    Article's DOI: 10.1109/JLT.2014.2379091
    Entity: Universitat Rovira i Virgili
    Journal publication year: 2015
    Publication Type: Journal Publications
  • Keywords:

    Atomic and Molecular Physics, and Optics,Engineering, Electrical & Electronic,Optics,Telecommunications
    Wave-guides
    Titanyl phosphate
    Reactive ion etching
    Rbtiopo4
    Rbtiopo 4
    Rbtiopo 4
    Rbtioaso4
    Optical waves
    Niobium
    Ktiopo4
    Integrated optical materials
    Growth
    Crystals
    Telecommunications
    Química
    Optics
    Odontología
    Matemática / probabilidade e estatística
    Interdisciplinar
    Engineering, electrical & electronic
    Engenharias iv
    Engenharias iii
    Ciência da computação
    Atomic and molecular physics, and optics
    Astronomia / física
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