Articles producció científica> Enginyeria Electrònica, Elèctrica i Automàtica

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

  • Identification data

    Identifier: imarina:9282549
    Authors:
    Annanouch, F EGracia, IFigueras, ELlobet, ECane, CVallejos, S
    Abstract:
    Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.
  • Others:

    Author, as appears in the article.: Annanouch, F E; Gracia, I; Figueras, E; Llobet, E; Cane, C; Vallejos, S
    Department: Enginyeria Electrònica, Elèctrica i Automàtica
    URV's Author/s: Annanouch, Fatima Ezahra / Llobet Valero, Eduard
    Keywords: Tungsten oxide Sensing property Principal component analysis Nanostructures Localized synthesis Gases Gas sensor microarrays Gas sensor arrays Gas detectors Functionalized nanostructures Functionalized materials Functionalizations Functionalization Chemical sensors Carbon monoxide Aerosols Aacvd
    Abstract: Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.
    Thematic Areas: Surfaces, coatings and films Spectroscopy Química Odontología Nutrição Metals and alloys Medicina ii Medicina i Materials chemistry Materiais Interdisciplinar Instruments & instrumentation Instrumentation Farmacia Engenharias iv Engenharias iii Engenharias ii Engenharias i Electronic, optical and magnetic materials Electrochemistry Electrical and electronic engineering Educação física Educação Economia Condensed matter physics Ciências biológicas iii Ciências biológicas ii Ciências biológicas i Ciências ambientais Ciências agrárias i Ciência de alimentos Ciência da computação Chemistry, analytical Biotecnología Biodiversidade Astronomia / física Analytical chemistry
    licence for use: https://creativecommons.org/licenses/by/3.0/es/
    Author's mail: fatimaezahra.annanouch@urv.cat eduard.llobet@urv.cat
    Author identifier: 0000-0003-1533-6482 0000-0001-6164-4342
    Record's date: 2024-10-12
    Papper version: info:eu-repo/semantics/acceptedVersion
    Link to the original source: https://www.sciencedirect.com/science/article/abs/pii/S0925400515004098
    Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
    Papper original source: Sensors And Actuators B-Chemical. 216 374-383
    APA: Annanouch, F E; Gracia, I; Figueras, E; Llobet, E; Cane, C; Vallejos, S (2015). Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays. Sensors And Actuators B-Chemical, 216(), 374-383. DOI: 10.1016/j.snb.2015.03.076
    Article's DOI: 10.1016/j.snb.2015.03.076
    Entity: Universitat Rovira i Virgili
    Journal publication year: 2015
    Publication Type: Journal Publications
  • Keywords:

    Chemistry, Analytical,Condensed Matter Physics,Electrical and Electronic Engineering,Electrochemistry,Electronic, Optical and Magnetic Materials,Instrumentation,Instruments & Instrumentation,Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films
    Tungsten oxide
    Sensing property
    Principal component analysis
    Nanostructures
    Localized synthesis
    Gases
    Gas sensor microarrays
    Gas sensor arrays
    Gas detectors
    Functionalized nanostructures
    Functionalized materials
    Functionalizations
    Functionalization
    Chemical sensors
    Carbon monoxide
    Aerosols
    Aacvd
    Surfaces, coatings and films
    Spectroscopy
    Química
    Odontología
    Nutrição
    Metals and alloys
    Medicina ii
    Medicina i
    Materials chemistry
    Materiais
    Interdisciplinar
    Instruments & instrumentation
    Instrumentation
    Farmacia
    Engenharias iv
    Engenharias iii
    Engenharias ii
    Engenharias i
    Electronic, optical and magnetic materials
    Electrochemistry
    Electrical and electronic engineering
    Educação física
    Educação
    Economia
    Condensed matter physics
    Ciências biológicas iii
    Ciências biológicas ii
    Ciências biológicas i
    Ciências ambientais
    Ciências agrárias i
    Ciência de alimentos
    Ciência da computação
    Chemistry, analytical
    Biotecnología
    Biodiversidade
    Astronomia / física
    Analytical chemistry
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