Author, as appears in the article.: Annanouch FE; Gràcia I; Figueras E; Llobet E; Cané C; Vallejos S
Department: Enginyeria Electrònica, Elèctrica i Automàtica
URV's Author/s: Llobet Valero, Eduard
Keywords: Tungsten oxide Sensing property Principal component analysis Nanostructures Localized synthesis Gases Gas sensor microarrays Gas sensor arrays Gas detectors Functionalized nanostructures Functionalized materials Functionalizations Functionalization Chemical sensors Carbon monoxide Aerosols Aacvd
Abstract: Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.
Thematic Areas: Surfaces, coatings and films Química Odontología Nutrição Metals and alloys Medicina ii Medicina i Materials chemistry Materiais Interdisciplinar Instruments & instrumentation Instrumentation Farmacia Engenharias iv Engenharias iii Engenharias ii Engenharias i Electronic, optical and magnetic materials Electrochemistry Electrical and electronic engineering Educação física Educação Economia Condensed matter physics Ciências biológicas iii Ciências biológicas ii Ciências biológicas i Ciências ambientais Ciências agrárias i Ciência de alimentos Ciência da computação Chemistry, analytical Biotecnología Biodiversidade Astronomia / física
licence for use: https://creativecommons.org/licenses/by/3.0/es/
Author's mail: eduard.llobet@urv.cat
Author identifier: 0000-0001-6164-4342
Record's date: 2023-02-19
Papper version: info:eu-repo/semantics/acceptedVersion
Link to the original source: https://www.sciencedirect.com/science/article/abs/pii/S0925400515004098
Licence document URL: http://repositori.urv.cat/ca/proteccio-de-dades/
Papper original source: Sensors And Actuators B-Chemical. 216 374-383
APA: Annanouch FE; Gràcia I; Figueras E; Llobet E; Cané C; Vallejos S (2015). Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays. Sensors And Actuators B-Chemical, 216(), 374-383. DOI: 10.1016/j.snb.2015.03.076
Article's DOI: 10.1016/j.snb.2015.03.076
Entity: Universitat Rovira i Virgili
Journal publication year: 2015
Publication Type: Journal Publications
Repositori URV