Articles producció científica> Enginyeria Electrònica, Elèctrica i Automàtica

Wafer-scale few-layer graphene growth on Cu/Ni films for gas sensing applications

  • Datos identificativos

    Identificador: imarina:6012743
    Autores:
    Deokar, GeetanjaliCasanova-Chafer, JuanRajput, Nitul SAubry, CyrilLlobet, EduardJouiad, MustaphaCosta, Pedro M F J
    Resumen:
    Pristine, few-layer graphene (FLG)/Si nanopillar assemblies are introduced as gas sensitive chemiresistors showing unprecedented sensitivity towards NO2 when operated at room temperature (25 degrees C) and in humid air. To achieve this, we first developed wafer-scale (similar to 50 cm(2)) FLG growth using sub-micrometer thick films of thermally evaporated Cu/Ni on a SiO2/Si substrate. The Ni film was deposited and annealed to induce the formation of a Cu-rich binary alloy. This alloy formation limited the inter-diffusion of Cu and SiO2, a phenomenon known to take place during the CVD growth of graphene on Cu/SiO2/Si. The as-grown high structural quality FLG was transferred, using a conventional wet chemical method, to lithographically patterned arrays of Si nanopillars (non-flat substrate). Testing of the FLG/Si assembly revealed a NO2 sensitivity that outperforms what is reported in the literature for pristine graphene. Overall, our growth and device fabrication work-flow demonstrate a way to design graphene-based gas sensing systems without incurring inconvenient processing steps such as metal foil etching, surface functionalization or particle loading.
  • Otros:

    Autor según el artículo: Deokar, Geetanjali; Casanova-Chafer, Juan; Rajput, Nitul S; Aubry, Cyril; Llobet, Eduard; Jouiad, Mustapha; Costa, Pedro M F J
    Departamento: Enginyeria Electrònica, Elèctrica i Automàtica
    Autor/es de la URV: Llobet Valero, Eduard
    Palabras clave: Temperature Roadmap Reduction Patterned substrates Oxide Hybrid High-quality Graphene Gas sensing Cvd-graphene Cuni alloy Chemical vapor deposition Chemical sensors
    Resumen: Pristine, few-layer graphene (FLG)/Si nanopillar assemblies are introduced as gas sensitive chemiresistors showing unprecedented sensitivity towards NO2 when operated at room temperature (25 degrees C) and in humid air. To achieve this, we first developed wafer-scale (similar to 50 cm(2)) FLG growth using sub-micrometer thick films of thermally evaporated Cu/Ni on a SiO2/Si substrate. The Ni film was deposited and annealed to induce the formation of a Cu-rich binary alloy. This alloy formation limited the inter-diffusion of Cu and SiO2, a phenomenon known to take place during the CVD growth of graphene on Cu/SiO2/Si. The as-grown high structural quality FLG was transferred, using a conventional wet chemical method, to lithographically patterned arrays of Si nanopillars (non-flat substrate). Testing of the FLG/Si assembly revealed a NO2 sensitivity that outperforms what is reported in the literature for pristine graphene. Overall, our growth and device fabrication work-flow demonstrate a way to design graphene-based gas sensing systems without incurring inconvenient processing steps such as metal foil etching, surface functionalization or particle loading.
    Áreas temáticas: Surfaces, coatings and films Spectroscopy Química Odontología Nutrição Metals and alloys Medicina ii Medicina i Materials chemistry Materiais Interdisciplinar Instruments & instrumentation Instrumentation Farmacia Engenharias iv Engenharias iii Engenharias ii Engenharias i Electronic, optical and magnetic materials Electrochemistry Electrical and electronic engineering Educação física Educação Economia Condensed matter physics Ciências biológicas iii Ciências biológicas ii Ciências biológicas i Ciências ambientais Ciências agrárias i Ciência de alimentos Ciência da computação Chemistry, analytical Biotecnología Biodiversidade Astronomia / física Analytical chemistry
    Acceso a la licencia de uso: https://creativecommons.org/licenses/by/3.0/es/
    ISSN: 0925-4005
    Direcció de correo del autor: eduard.llobet@urv.cat
    Identificador del autor: 0000-0001-6164-4342
    Fecha de alta del registro: 2024-10-12
    Versión del articulo depositado: info:eu-repo/semantics/acceptedVersion
    Enlace a la fuente original: https://www.sciencedirect.com/science/article/abs/pii/S0925400519316570
    URL Documento de licencia: https://repositori.urv.cat/ca/proteccio-de-dades/
    Referencia al articulo segun fuente origial: Sensors And Actuators B-Chemical. 305 (127458): 127458-
    Referencia de l'ítem segons les normes APA: Deokar, Geetanjali; Casanova-Chafer, Juan; Rajput, Nitul S; Aubry, Cyril; Llobet, Eduard; Jouiad, Mustapha; Costa, Pedro M F J (2020). Wafer-scale few-layer graphene growth on Cu/Ni films for gas sensing applications. Sensors And Actuators B-Chemical, 305(127458), 127458-. DOI: 10.1016/j.snb.2019.127458
    DOI del artículo: 10.1016/j.snb.2019.127458
    Entidad: Universitat Rovira i Virgili
    Año de publicación de la revista: 2020
    Tipo de publicación: Journal Publications
  • Palabras clave:

    Chemistry, Analytical,Condensed Matter Physics,Electrical and Electronic Engineering,Electrochemistry,Electronic, Optical and Magnetic Materials,Instrumentation,Instruments & Instrumentation,Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films
    Temperature
    Roadmap
    Reduction
    Patterned substrates
    Oxide
    Hybrid
    High-quality
    Graphene
    Gas sensing
    Cvd-graphene
    Cuni alloy
    Chemical vapor deposition
    Chemical sensors
    Surfaces, coatings and films
    Spectroscopy
    Química
    Odontología
    Nutrição
    Metals and alloys
    Medicina ii
    Medicina i
    Materials chemistry
    Materiais
    Interdisciplinar
    Instruments & instrumentation
    Instrumentation
    Farmacia
    Engenharias iv
    Engenharias iii
    Engenharias ii
    Engenharias i
    Electronic, optical and magnetic materials
    Electrochemistry
    Electrical and electronic engineering
    Educação física
    Educação
    Economia
    Condensed matter physics
    Ciências biológicas iii
    Ciências biológicas ii
    Ciências biológicas i
    Ciências ambientais
    Ciências agrárias i
    Ciência de alimentos
    Ciência da computação
    Chemistry, analytical
    Biotecnología
    Biodiversidade
    Astronomia / física
    Analytical chemistry
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