Articles producció científica> Enginyeria Electrònica, Elèctrica i Automàtica

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

  • Dades identificatives

    Identificador: PC:1197
    Handle: https://hdl.handle.net/20.500.11797/PC1197
    Autors:
    E. LlobetF.E. Annanoucha,I. GràciaE. FiguerasC. CanéS. Vallejos
    Resum:
    Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.

  • Altres:

    Autor segons l'article: E. Llobet F.E. Annanoucha, I. Gràcia E. Figueras C. Cané S. Vallejos
    Departament: Enginyeria Electrònica, Elèctrica i Automàtica
    Autor/s de la URV: LLOBET VALERO, EDUARD F.E. Annanoucha, I. Gràcia E. Figueras C. Cané S. Vallejos
    Paraules clau: AACVD functionalization Gas sensor arrays
    Resum: Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.
    Grup de recerca: Microsystems and Nanotechnologies for Chemical Analysis
    Àrees temàtiques: Enginyeria electrònica Ingeniería electrónica Electronic engineering
    Accès a la llicència d'ús: https://creativecommons.org/licenses/by/3.0/es/
    ISSN: 0925-4005
    Identificador de l'autor: 0000-0001-6164-4342 n/a n/a 0000-0002-4229-3214 n/a n/a
    Data d'alta del registre: 2015-08-05
    Pàgina final: 383
    Volum de revista: 216
    Versió de l'article dipositat: info:eu-repo/semantics/acceptedVersion
    Enllaç font original: http://www.sciencedirect.com/science/article/pii/S0925400515004098
    URL Document de llicència: https://repositori.urv.cat/ca/proteccio-de-dades/
    DOI de l'article: 10.1016/j.snb.2015.03.076
    Entitat: Universitat Rovira i Virgili
    Any de publicació de la revista: 2015
    Pàgina inicial: 374
    Tipus de publicació: Article Artículo Article

  • Paraules clau:

    Nanotecnologia
    Gas, Detectors de
    Deposició química en fase vapor
    AACVD
    functionalization
    Gas sensor arrays
    Enginyeria electrònica
    Ingeniería electrónica
    Electronic engineering
    0925-4005

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