Articles producció científica> Enginyeria Electrònica, Elèctrica i Automàtica

Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays

  • Datos identificativos

    Identificador: PC:1197
    Handle: https://hdl.handle.net/20.500.11797/PC1197
    Autores:
    E. LlobetF.E. Annanoucha,I. GràciaE. FiguerasC. CanéS. Vallejos
    Resumen:
    Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.

  • Otros:

    Autor según el artículo: E. Llobet F.E. Annanoucha, I. Gràcia E. Figueras C. Cané S. Vallejos
    Departamento: Enginyeria Electrònica, Elèctrica i Automàtica
    Autor/es de la URV: LLOBET VALERO, EDUARD F.E. Annanoucha, I. Gràcia E. Figueras C. Cané S. Vallejos
    Palabras clave: AACVD functionalization Gas sensor arrays
    Resumen: Abstract The self-heating capability of MEMS-based devices is used to grow locally into the sensing active area of monolithic gas sensor microarrays differently-functionalized materials via aerosol-assisted CVD. Results derived from SEM, TEM, XRD and Raman demonstrate the integration of non-functionalized (WO3-x) and functionalized nanostructures with gold (WO3-x/Au) or platinum (WO3-x/Pt) NPs into the array. Tests of these microarrays toward various concentrations of reducing gases show stable and reproducible responses, with the highest responses (R) for WO3-x to carbon monoxide (e.g. R = 4.3-80 ppm), for WO3-x/Au to ethanol (e.g. R = 7-80 ppm) and for WO3-x/Pt to hydrogen (e.g. R = 3.6-80 ppm). Principal component analysis of the sensor response replicates to each gas and concentration suggest that the differences in the sensing properties of each element of the array provide the complementary information to discriminate H2 and EtOH from CO. © 2015 Elsevier B.V. All rights reserved.
    Grupo de investigación: Microsystems and Nanotechnologies for Chemical Analysis
    Áreas temáticas: Enginyeria electrònica Ingeniería electrónica Electronic engineering
    Acceso a la licencia de uso: https://creativecommons.org/licenses/by/3.0/es/
    ISSN: 0925-4005
    Identificador del autor: 0000-0001-6164-4342 n/a n/a 0000-0002-4229-3214 n/a n/a
    Fecha de alta del registro: 2015-08-05
    Página final: 383
    Volumen de revista: 216
    Versión del articulo depositado: info:eu-repo/semantics/acceptedVersion
    URL Documento de licencia: https://repositori.urv.cat/ca/proteccio-de-dades/
    Entidad: Universitat Rovira i Virgili
    Año de publicación de la revista: 2015
    Página inicial: 374
    Tipo de publicación: Article Artículo Article

  • Palabras clave:

    Nanotecnologia
    Gas, Detectors de
    Deposició química en fase vapor
    AACVD
    functionalization
    Gas sensor arrays
    Enginyeria electrònica
    Ingeniería electrónica
    Electronic engineering
    0925-4005

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