Autor segons l'article: Vazquez, R M; Mozalev, A; Llobet, E
Departament: Enginyeria Electrònica, Elèctrica i Automàtica
Autor/s de la URV: Llobet Valero, Eduard / VÁZQUEZ FERNÁNDEZ, ROSA MARÍA
Paraules clau: Porous alumina Niobium oxide Nanostructure Hydrogen sensor Anodizing
Resum: © 2014 The Authors. Published by Elsevier Ltd. Nanostructured niobium oxide semiconductor is gaining increasing attention as electro-optic and gas sensing material. However, the preparation of stable niobium oxide nanofilm with reproducible morphology and behaviour remains a challenge. Here we describe a rapid and well-controlled approach to synthesize a niobium oxide film with the columnlike nanostructured morphology via anodic processing of Al/Nb metal layers sputtered onto an oxide-coated Si wafer. The film is developed due to the growth of a nanoporous anodic alumina layer followed by pore-directed oxidation of the Nb underlayer. The post-anodizing treatment results in the controlled formation of Nb2O5 crystal phase, which causes the transformation from dielectric to n-type semiconductor behavior of the film. A laboratory gas sensor fabricated by uniting the anodizing approach developed here with standard micromachining technologies shows superior characteristics for hydrogen gas detection, the response-recovery time being among best ever reported.
Àrees temàtiques: Química Odontología Medicina ii Medicina i Materiais Interdisciplinar General engineering Farmacia Engineering (miscellaneous) Engineering (all) Engenharias iv Engenharias iii Engenharias ii Enfermagem Ciências biológicas iii Ciências biológicas ii Ciências biológicas i Ciências ambientais Ciência de alimentos Biotecnología Astronomia / física Arquitetura, urbanismo e design Arquitetura e urbanismo
Accès a la llicència d'ús: https://creativecommons.org/licenses/by/3.0/es/
Adreça de correu electrònic de l'autor: eduard.llobet@urv.cat
Identificador de l'autor: 0000-0001-6164-4342
Data d'alta del registre: 2024-10-12
Versió de l'article dipositat: info:eu-repo/semantics/publishedVersion
Enllaç font original: https://www.sciencedirect.com/science/article/pii/S1877705814027969
URL Document de llicència: https://repositori.urv.cat/ca/proteccio-de-dades/
Referència a l'article segons font original: Procedia Engineering. 87 811-814
Referència de l'ítem segons les normes APA: Vazquez, R M; Mozalev, A; Llobet, E (2014). Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers. Amsterdam: Elsevier
DOI de l'article: 10.1016/j.proeng.2014.11.674
Entitat: Universitat Rovira i Virgili
Any de publicació de la revista: 2014
Tipus de publicació: Proceedings Paper