Author, as appears in the article.: Vazquez, R M; Mozalev, A; Llobet, E
Department: Enginyeria Electrònica, Elèctrica i Automàtica
URV's Author/s: Llobet Valero, Eduard / VÁZQUEZ FERNÁNDEZ, ROSA MARÍA
Keywords: Porous alumina Niobium oxide Nanostructure Hydrogen sensor Anodizing
Abstract: © 2014 The Authors. Published by Elsevier Ltd. Nanostructured niobium oxide semiconductor is gaining increasing attention as electro-optic and gas sensing material. However, the preparation of stable niobium oxide nanofilm with reproducible morphology and behaviour remains a challenge. Here we describe a rapid and well-controlled approach to synthesize a niobium oxide film with the columnlike nanostructured morphology via anodic processing of Al/Nb metal layers sputtered onto an oxide-coated Si wafer. The film is developed due to the growth of a nanoporous anodic alumina layer followed by pore-directed oxidation of the Nb underlayer. The post-anodizing treatment results in the controlled formation of Nb2O5 crystal phase, which causes the transformation from dielectric to n-type semiconductor behavior of the film. A laboratory gas sensor fabricated by uniting the anodizing approach developed here with standard micromachining technologies shows superior characteristics for hydrogen gas detection, the response-recovery time being among best ever reported.
Thematic Areas: Química Odontología Medicina ii Medicina i Materiais Interdisciplinar General engineering Farmacia Engineering (miscellaneous) Engineering (all) Engenharias iv Engenharias iii Engenharias ii Enfermagem Ciências biológicas iii Ciências biológicas ii Ciências biológicas i Ciências ambientais Ciência de alimentos Biotecnología Astronomia / física Arquitetura, urbanismo e design Arquitetura e urbanismo
licence for use: https://creativecommons.org/licenses/by/3.0/es/
Author's mail: eduard.llobet@urv.cat
Author identifier: 0000-0001-6164-4342
Record's date: 2024-10-12
Papper version: info:eu-repo/semantics/publishedVersion
Link to the original source: https://www.sciencedirect.com/science/article/pii/S1877705814027969
Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
Papper original source: Procedia Engineering. 87 811-814
APA: Vazquez, R M; Mozalev, A; Llobet, E (2014). Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers. Amsterdam: Elsevier
Article's DOI: 10.1016/j.proeng.2014.11.674
Entity: Universitat Rovira i Virgili
Journal publication year: 2014
Publication Type: Proceedings Paper
Repositori URV