Articles producció científica> Enginyeria Electrònica, Elèctrica i Automàtica

Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers

  • Identification data

    Identifier: imarina:5609698
  • Authors:

    Vázquez R
    Mozalev A
    Llobet E
  • Others:

    Author, as appears in the article.: Vázquez R; Mozalev A; Llobet E
    Department: Enginyeria Electrònica, Elèctrica i Automàtica
    URV's Author/s: Llobet Valero, Eduard / VÁZQUEZ FERNÁNDEZ, ROSA MARÍA
    Keywords: Anodizing Hydrogen sensor Nanostructure Niobium oxide Porous alumina
    Abstract: © 2014 The Authors. Published by Elsevier Ltd. Nanostructured niobium oxide semiconductor is gaining increasing attention as electro-optic and gas sensing material. However, the preparation of stable niobium oxide nanofilm with reproducible morphology and behaviour remains a challenge. Here we describe a rapid and well-controlled approach to synthesize a niobium oxide film with the columnlike nanostructured morphology via anodic processing of Al/Nb metal layers sputtered onto an oxide-coated Si wafer. The film is developed due to the growth of a nanoporous anodic alumina layer followed by pore-directed oxidation of the Nb underlayer. The post-anodizing treatment results in the controlled formation of Nb2O5 crystal phase, which causes the transformation from dielectric to n-type semiconductor behavior of the film. A laboratory gas sensor fabricated by uniting the anodizing approach developed here with standard micromachining technologies shows superior characteristics for hydrogen gas detection, the response-recovery time being among best ever reported.
    Thematic Areas: Arquitetura e urbanismo Arquitetura, urbanismo e design Astronomia / física Biotecnología Ciência de alimentos Ciências ambientais Ciências biológicas i Ciências biológicas ii Ciências biológicas iii Enfermagem Engenharias ii Engenharias iii Engenharias iv Engineering (all) Engineering (miscellaneous) Farmacia General engineering Interdisciplinar Materiais Medicina i Medicina ii Odontología Química
    licence for use: https://creativecommons.org/licenses/by/3.0/es/
    Author's mail: eduard.llobet@urv.cat
    Author identifier: 0000-0001-6164-4342
    Record's date: 2023-05-20
    Papper version: info:eu-repo/semantics/publishedVersion
    Link to the original source: https://www.sciencedirect.com/science/article/pii/S1877705814027969
    Papper original source: Procedia Engineering. 87 811-814
    APA: Vázquez R; Mozalev A; Llobet E (2014). Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers.
    Licence document URL: https://repositori.urv.cat/ca/proteccio-de-dades/
    Article's DOI: 10.1016/j.proeng.2014.11.674
    Entity: Universitat Rovira i Virgili
    Journal publication year: 2014
    Publication Type: Proceedings Paper
  • Keywords:

    Engineering (Miscellaneous)
    Anodizing
    Hydrogen sensor
    Nanostructure
    Niobium oxide
    Porous alumina
    Arquitetura e urbanismo
    Arquitetura, urbanismo e design
    Astronomia / física
    Biotecnología
    Ciência de alimentos
    Ciências ambientais
    Ciências biológicas i
    Ciências biológicas ii
    Ciências biológicas iii
    Enfermagem
    Engenharias ii
    Engenharias iii
    Engenharias iv
    Engineering (all)
    Engineering (miscellaneous)
    Farmacia
    General engineering
    Interdisciplinar
    Materiais
    Medicina i
    Medicina ii
    Odontología
    Química
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