Articles producció científica> Enginyeria Electrònica, Elèctrica i Automàtica

Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers

  • Datos identificativos

    Identificador: imarina:5609698
    Autores:
    Vazquez, R MMozalev, ALlobet, E
    Resumen:
    © 2014 The Authors. Published by Elsevier Ltd. Nanostructured niobium oxide semiconductor is gaining increasing attention as electro-optic and gas sensing material. However, the preparation of stable niobium oxide nanofilm with reproducible morphology and behaviour remains a challenge. Here we describe a rapid and well-controlled approach to synthesize a niobium oxide film with the columnlike nanostructured morphology via anodic processing of Al/Nb metal layers sputtered onto an oxide-coated Si wafer. The film is developed due to the growth of a nanoporous anodic alumina layer followed by pore-directed oxidation of the Nb underlayer. The post-anodizing treatment results in the controlled formation of Nb2O5 crystal phase, which causes the transformation from dielectric to n-type semiconductor behavior of the film. A laboratory gas sensor fabricated by uniting the anodizing approach developed here with standard micromachining technologies shows superior characteristics for hydrogen gas detection, the response-recovery time being among best ever reported.
  • Otros:

    Autor según el artículo: Vazquez, R M; Mozalev, A; Llobet, E
    Departamento: Enginyeria Electrònica, Elèctrica i Automàtica
    Autor/es de la URV: Llobet Valero, Eduard / VÁZQUEZ FERNÁNDEZ, ROSA MARÍA
    Palabras clave: Porous alumina Niobium oxide Nanostructure Hydrogen sensor Anodizing
    Resumen: © 2014 The Authors. Published by Elsevier Ltd. Nanostructured niobium oxide semiconductor is gaining increasing attention as electro-optic and gas sensing material. However, the preparation of stable niobium oxide nanofilm with reproducible morphology and behaviour remains a challenge. Here we describe a rapid and well-controlled approach to synthesize a niobium oxide film with the columnlike nanostructured morphology via anodic processing of Al/Nb metal layers sputtered onto an oxide-coated Si wafer. The film is developed due to the growth of a nanoporous anodic alumina layer followed by pore-directed oxidation of the Nb underlayer. The post-anodizing treatment results in the controlled formation of Nb2O5 crystal phase, which causes the transformation from dielectric to n-type semiconductor behavior of the film. A laboratory gas sensor fabricated by uniting the anodizing approach developed here with standard micromachining technologies shows superior characteristics for hydrogen gas detection, the response-recovery time being among best ever reported.
    Áreas temáticas: Química Odontología Medicina ii Medicina i Materiais Interdisciplinar General engineering Farmacia Engineering (miscellaneous) Engineering (all) Engenharias iv Engenharias iii Engenharias ii Enfermagem Ciências biológicas iii Ciências biológicas ii Ciências biológicas i Ciências ambientais Ciência de alimentos Biotecnología Astronomia / física Arquitetura, urbanismo e design Arquitetura e urbanismo
    Acceso a la licencia de uso: https://creativecommons.org/licenses/by/3.0/es/
    Direcció de correo del autor: eduard.llobet@urv.cat
    Identificador del autor: 0000-0001-6164-4342
    Fecha de alta del registro: 2024-10-12
    Versión del articulo depositado: info:eu-repo/semantics/publishedVersion
    Enlace a la fuente original: https://www.sciencedirect.com/science/article/pii/S1877705814027969
    URL Documento de licencia: https://repositori.urv.cat/ca/proteccio-de-dades/
    Referencia al articulo segun fuente origial: Procedia Engineering. 87 811-814
    Referencia de l'ítem segons les normes APA: Vazquez, R M; Mozalev, A; Llobet, E (2014). Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers. Amsterdam: Elsevier
    DOI del artículo: 10.1016/j.proeng.2014.11.674
    Entidad: Universitat Rovira i Virgili
    Año de publicación de la revista: 2014
    Tipo de publicación: Proceedings Paper
  • Palabras clave:

    Engineering (Miscellaneous)
    Porous alumina
    Niobium oxide
    Nanostructure
    Hydrogen sensor
    Anodizing
    Química
    Odontología
    Medicina ii
    Medicina i
    Materiais
    Interdisciplinar
    General engineering
    Farmacia
    Engineering (miscellaneous)
    Engineering (all)
    Engenharias iv
    Engenharias iii
    Engenharias ii
    Enfermagem
    Ciências biológicas iii
    Ciências biológicas ii
    Ciências biológicas i
    Ciências ambientais
    Ciência de alimentos
    Biotecnología
    Astronomia / física
    Arquitetura, urbanismo e design
    Arquitetura e urbanismo
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