Autor segons l'article: Debeda H; Lakhmi R; Clement P; Llobet E; Zamarreno CR; Arregui FJ; Lucat C
Departament: Enginyeria Electrònica, Elèctrica i Automàtica
Autor/s de la URV: Llobet Valero, Eduard
Paraules clau: Thick films Silicon technologies Screen-printing Screen printing technology Screen printing Sacrificial layer Room temperature Nanocantilevers Micro-cantilevers Humidity and voc detection Gold coatings Gas detectors Chemical sensors Chemical sensing Cantilevers Alternative technologies
Resum: Researches on microcantilever MEMS are numerous in different areas, physical or chemical sensing, actuation or energy harvesting. Because of their high sensitivity at room temperature, they have been shown to be interesting for gas detection. Though silicon technology allows the processing of such cantilevers, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film cantilevers is studied, through the association of the sacrificial layer process to the wellknown screen-printing technology used for the fabrication of low cost components and microsystems. Epoxytype, gold and resonant piezoelectric Au/PZT/Au cantilevers with or without coating have been successfully tested under humidity, toluene and benzene. The potentiality of the screen-printing technology for the development of cantilever-based gas sensors is demonstrated. © 2014 by IFSA Publishing, S. L.
Àrees temàtiques: Química Materiais Interdisciplinar Engenharias iv Engenharias ii Electrical and electronic engineering Control and systems engineering Ciência da computação Biodiversidade
Accès a la llicència d'ús: https://creativecommons.org/licenses/by/3.0/es/
Adreça de correu electrònic de l'autor: eduard.llobet@urv.cat
Identificador de l'autor: 0000-0001-6164-4342
Data d'alta del registre: 2023-02-19
Versió de l'article dipositat: info:eu-repo/semantics/publishedVersion
Referència a l'article segons font original: Sensors And Transducers. 173 (6): 215-223
Referència de l'ítem segons les normes APA: Debeda H; Lakhmi R; Clement P; Llobet E; Zamarreno CR; Arregui FJ; Lucat C (2014). Inorganic and organic screen-printed cantilever-based gas sensors. Sensors And Transducers, 173(6), 215-223
URL Document de llicència: https://repositori.urv.cat/ca/proteccio-de-dades/
Entitat: Universitat Rovira i Virgili
Any de publicació de la revista: 2014
Tipus de publicació: Journal Publications
Repositori URV