Articles producció científica> Enginyeria Electrònica, Elèctrica i Automàtica

Inorganic and organic screen-printed cantilever-based gas sensors

  • Datos identificativos

    Identificador: imarina:9285435
    Autores:
    Debeda HLakhmi RClement PLlobet EZamarreno CRArregui FJLucat C
    Resumen:
    Researches on microcantilever MEMS are numerous in different areas, physical or chemical sensing, actuation or energy harvesting. Because of their high sensitivity at room temperature, they have been shown to be interesting for gas detection. Though silicon technology allows the processing of such cantilevers, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film cantilevers is studied, through the association of the sacrificial layer process to the wellknown screen-printing technology used for the fabrication of low cost components and microsystems. Epoxytype, gold and resonant piezoelectric Au/PZT/Au cantilevers with or without coating have been successfully tested under humidity, toluene and benzene. The potentiality of the screen-printing technology for the development of cantilever-based gas sensors is demonstrated.  © 2014 by IFSA Publishing, S. L.
  • Otros:

    Autor según el artículo: Debeda H; Lakhmi R; Clement P; Llobet E; Zamarreno CR; Arregui FJ; Lucat C
    Departamento: Enginyeria Electrònica, Elèctrica i Automàtica
    Autor/es de la URV: Llobet Valero, Eduard
    Palabras clave: Thick films Silicon technologies Screen-printing Screen printing technology Screen printing Sacrificial layer Room temperature Nanocantilevers Micro-cantilevers Humidity and voc detection Gold coatings Gas detectors Chemical sensors Chemical sensing Cantilevers Alternative technologies
    Resumen: Researches on microcantilever MEMS are numerous in different areas, physical or chemical sensing, actuation or energy harvesting. Because of their high sensitivity at room temperature, they have been shown to be interesting for gas detection. Though silicon technology allows the processing of such cantilevers, alternative technologies are also attractive and have been developed for a few years. Potential achievement of organic and inorganic thick-film cantilevers is studied, through the association of the sacrificial layer process to the wellknown screen-printing technology used for the fabrication of low cost components and microsystems. Epoxytype, gold and resonant piezoelectric Au/PZT/Au cantilevers with or without coating have been successfully tested under humidity, toluene and benzene. The potentiality of the screen-printing technology for the development of cantilever-based gas sensors is demonstrated.  © 2014 by IFSA Publishing, S. L.
    Áreas temáticas: Química Materiais Interdisciplinar Engenharias iv Engenharias ii Electrical and electronic engineering Control and systems engineering Ciência da computação Biodiversidade
    Acceso a la licencia de uso: https://creativecommons.org/licenses/by/3.0/es/
    Direcció de correo del autor: eduard.llobet@urv.cat
    Identificador del autor: 0000-0001-6164-4342
    Fecha de alta del registro: 2023-02-19
    Versión del articulo depositado: info:eu-repo/semantics/publishedVersion
    Enlace a la fuente original: https://www.sensorsportal.com/HTML/DIGEST/P_RP_0148.htm
    Referencia al articulo segun fuente origial: Sensors And Transducers. 173 (6): 215-223
    Referencia de l'ítem segons les normes APA: Debeda H; Lakhmi R; Clement P; Llobet E; Zamarreno CR; Arregui FJ; Lucat C (2014). Inorganic and organic screen-printed cantilever-based gas sensors. Sensors And Transducers, 173(6), 215-223
    URL Documento de licencia: https://repositori.urv.cat/ca/proteccio-de-dades/
    Entidad: Universitat Rovira i Virgili
    Año de publicación de la revista: 2014
    Tipo de publicación: Journal Publications
  • Palabras clave:

    Control and Systems Engineering,Electrical and Electronic Engineering
    Thick films
    Silicon technologies
    Screen-printing
    Screen printing technology
    Screen printing
    Sacrificial layer
    Room temperature
    Nanocantilevers
    Micro-cantilevers
    Humidity and voc detection
    Gold coatings
    Gas detectors
    Chemical sensors
    Chemical sensing
    Cantilevers
    Alternative technologies
    Química
    Materiais
    Interdisciplinar
    Engenharias iv
    Engenharias ii
    Electrical and electronic engineering
    Control and systems engineering
    Ciência da computação
    Biodiversidade
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